| 摘要 |
PURPOSE: A magnetic driving device for sputtering apparatus is provided which brings a uniform erosion of the sputtering target for the substrate of good quality coating by preventing the concentration of plasma generation. CONSTITUTION: A belt conveyer system having two rotary shaft pulleys in parallel and an endless belt larger in width and length than the target is provided on the back side of the target to carry magnets each having different poles for the top and the bottom and being in a shape of plastic bar arranged in parallel to the belt pulley shafts in a regular spacing and alternatively sided with another bar shape magnets each having poles oppositely formed and linked at both ends in a shape of eclipse housing and plastic bar magnet. The belt moves at a slow steady speed to distribute magnetic flux evenly and being uniform sputtering.
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