发明名称 CIS-BANDSOLARZELLE-VERFAHREN UND VORRICHTUNG ZU IHRER HERSTELLUNG
摘要 <p>PCT No. PCT/DE97/01832 Sec. 371 Date Mar. 1, 1999 Sec. 102(e) Date Mar. 1, 1999 PCT Filed Aug. 21, 1997 PCT Pub. No. WO98/09337 PCT Pub. Date Mar. 5, 1998The invention relates to a method of fabricating a strip CIS solar cell and an apparatus for practicing the method. It is the task of the invention to describe a method and an apparatus for providing a technical solution as well as the required layer structure, by which it is possible economically to fabricate adhering CIS solar cells on copper strips. In accordance with the invention the task is solved by a first step of continuously galvanically coating one side of a pre-cleaned copper strip with indium, a second step of very quickly heating the copper strip coated with indium by a contact method with a heated body of graphite and to bring one side into contact with a heated sulfur or selenium containing carrier gas in a narrow gap, a third step of selectively removing by an etching technique the generated cover layer of copper sulfide or selenide, and a fourth step of providing a p+ conductive transparent collector or planarizing layer of copper oxide/sulfide. It is a further object of the invention to develop a reactor for practicing the method. The reactor consists of a strip heater made of graphite convexly curved at its gapped surface, a gas heater also made of graphite concavely curved at the gapped surface and quartz glass plates which close a gap set between the strip heater and the gas heater toward the exterior. The strip heater and the gas heater may be separately heated from their interior or their exterior to the necessary process temperatures by radiation heaters.</p>
申请公布号 AT189940(T) 申请公布日期 2000.03.15
申请号 AT19970941816T 申请日期 1997.08.21
申请人 IST-INSTITUT FUER SOLARTECHNOLOGIEN GMBH 发明人 PENNDORF, JUERGEN
分类号 H01L31/04;C25D5/48;H01L31/032;H01L31/0336;H01L31/0392;H01L31/18;(IPC1-7):H01L31/033 主分类号 H01L31/04
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