| 摘要 |
PROBLEM TO BE SOLVED: To provide a position detection method and a position detection device by which a position can be detected with high precision, and an ultrasonic motor which employs the method and the device. SOLUTION: A position detection device has two members 5e and 6e which are made to face each other so as to have vibration able to be transmitted from one to the other, a vibrating means 5v which makes the member 5e vibrate so as to generate a standing wave in the position detection direction, a detecting means 6v which outputs a signal corresponding to the vibration of the other member 6e and a comparing means which compares the output signal with a predetermined reference signal Vs. An ultrasonic motor having such position detection function is constructed in such a manner that driving signals Vs and Vc are supplied to vibrate so as to generate a propagation wave on at least one of facing surfaces of a stator 5 and a mover 6 which are made to face each other in a pressure contact state, and the mover 6 is moved in accordance with the vibration. |
