Ion implantation dosimetry method and apparatus

摘要

A sample (6) is exposed to a beam of positrons and a detector (8) detects gamma radiation produced by positron annihilation in the sample. A computer-controlled data collection and analysis system (20) analyses the detected gamma radiation to produce a readout of sample implantation dose. The energy of the positrons can be set to a predetermined value to derive a measure of implantation dose at a selected depth within the sample.