| 摘要 |
PROBLEM TO BE SOLVED: To eliminate an energy loss and accurately regulate humidity, particularly stably and accurately regulate a low humidity range by disposing an air intake port of a humidifier to an air passage between a front cooler and a rear cooler and an air exhaust port of the humidifier to the passage downstream of the rear cooler. SOLUTION: The air A in a housing 11 is cooled by coolers 3, 4, supplied to two processing systems Dp downstream side of the cooler 4, humidified by a humidifier 5p to become the air Adp,... regulated at a temperature and a humidity, and the air is supplied to two spaces Sp,... to be air conditioned. The air A supplied to the humidifiers 5p,... is taken from air inlets 5ip,... opposed to an air passage 2 between the coolers 3 and 4. Since air outlets 5op,... are connected to communicate with a bottom 11d of the housing 11 downstream of the cooler 4, wet airs (steam) generated from the humidifier 5p,... are advanced from the outlets 5op,... to the passage 2 in which heaters 12p,... are arranged.
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