| 摘要 |
PROBLEM TO BE SOLVED: To reduce noise generated by the variation of power source current and signal current in the case where logical state of each device simultaneously varys in a simultaneous testing of plural devices. SOLUTION: A plurality of devices to be measured 18a, 18b, 18c and 18d are simultaneously tested. In this case, by shifting input timings of test signals for each semiconductor integrated circuit to be measured, the timing of generating noise on the power source line and ground line are shifted.
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