| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent a base which supports a stage from being vibrated caused by the difference between reactions resulting from the movement of the stage and the compensating forces of the reactions. SOLUTION: Linear motors 40A and 40B, respectively composed of movers 36A and 36B and integrally attached to a stage RST, and stators 38A and 38B which are supported by a supporting member 58, in such a way that the stators 38A and 38B can move relative to the movers 36A and 36B in the X-axis direction integrally with the stage RST, and, at the same time, the stators 38A and 38B can move in the X-axis direction with respect to a base, are used as the drive devices for the stage RST. When the stage RST is moved by means of the motors 40A and 40B, although the reactions of the drive forces act on the stators 38A and 38B, since the stators 38A and 38B are supported by the support member 58 in such a state that the stators 38A and 38B is movable in the X-axis direction with respect to the base, the reactions are not transmitted to the base. Therefore, the base can be prevented from being vibrated by reactions when the state RST is driven.</p> |
