| 摘要 |
Opposed faces of two disk substrates are bonded by an adhesive layer whose characteristic parameters are set in predetermined ranges, particularly in the values of a product of Young's modulus and the film thickness in a range of 1.0x10-2kg/mm to 3.0 kg/mm, a product of Young's module and the thermal expansion coefficient in a range not larger than 1.5x10-2kgxmm-2x DEG C.-1, or a product of the thermal expansion coefficient and the film thickness in a range not larger than 2.0x10-5 mm / DEG C. Preferably, the glass transition point of the used adhesive is set to a value in a range of 20 DEG C. to 80 DEG C., and the film thickness is set to a value in a range of 10 mu m to 100 mu m.
|
