| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of inspecting the narrow-pitch wiring in an electric continuity inspection. SOLUTION: A sensor part 10 is composed of a substrate (a glass substrate) 11, a sensor area S is arranged on a center part of the substrate 11 and a driver area D is arranged on its edge part. A plurality of electrodes comprising metallic films are arranged on the sensor area S in a matrix condition. The pitch of a plurality of electrode pitches is smaller than the minimum pitch of the wiring pattern of a printed circuit board 30. An electrode (a) corresponding to a part A to be inspected of the printed circuit board 30 and an electrode (b) corresponding to a part B to be inspected are selected out of a plurality of electrodes, a test electric potential WTV is supplied to the part (a) to be inspected through the electrode (a), and the electric potential at the part B to be inspected is detected through the electrode (b).
|
