发明名称 WINDOW FOIL COOLING DEVICE OF ELECTRON BEAM EXHAUST GAS PROCESSOR
摘要 PROBLEM TO BE SOLVED: To provide a window foil cooling device of electron beam exhaust gas processor which never leads to insufficient cooling because a disturbance is caused in the cooling air flow downstream the distance piece provided for maintaining the width gap of the slit of a slit shape nozzle for blowing cooling air to the window foil. SOLUTION: This cooling device is constituted to be provided with a window foil extended on a window foil pushing member and a continuous slit shape nozzle 5 so as to uniformly blow the cooling air from the slit shape nozzle 5 to the window foil. In this case, the cross sectional shape of a distance piece 10 provided with a specific gap in the longitudinal direction of the slit so that the slit width dimension of the slit shape nozzle 5 is not collapsed by the external force has a wing shape having a streamline.
申请公布号 JP2000065997(A) 申请公布日期 2000.03.03
申请号 JP19980234103 申请日期 1998.08.20
申请人 EBARA CORP 发明人 MURAYAMA TAKURO;NAKANISHI IKUO
分类号 G21K5/00;(IPC1-7):G21K5/00 主分类号 G21K5/00
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