| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce a quantity of a chemical carried over to a next washing equipment by extending part of a cage-like carrier for holding objects to be processed such as substrates above a storing section, and providing hooks in the extended parts. SOLUTION: A cage-like carrier for holding objects to be processed such as substrates has the upper ends of its four upright bars 11a-11d extended above crossbars 13c, 14c, 15b, 15d located nearly at the upper ends of a glass substrate storing section. The upper end part of each upright bar is provided with a hook 18a, 18b, 18c, 18d projecting inward, These hooks 18a, 18b, 18c, 18d are engaged with V-shaped recessed sections, which are receiving sections 57a, 57b formed at the lower ends of lift arms 56a, 56b of an elevation equipment, to move the carrier up and down without deviation in position between the right and the left side.</p> |
