| 摘要 |
PROBLEM TO BE SOLVED: To transmit in the specified direction charged particles emitted from a charged particle source without any attenuation by applying different voltage to an outer cylinder electrode and a column electrode. SOLUTION: A plurality of columnar electrodes 11 is arranged on the inside of an outer cylinder electrode 5. Voltage is applied to the columnar electrodes 11 from an inner applying power source 13, and voltage is applied to the outer cylinder electrode 5 from an outer applying power source 14. By the potential difference between voltage applied to the outer cylinder electrode 5 and that applied to the columnar electrodes 11, an electric field is generated in the vicinity of the outer cylinder electrode 5. By the difference between distances between the outer cylinder electrode 5 and the columnar electrodes 11, different electric field intensity is produced, and the bending direction of the charged particles is made highly random. The charged particles are struck against the columnar electrodes 11 having the same potential and absorbed, and as a result, probability of striking of the charged particles against the columnar electrodes 11 is remarkably reduced. By the random property, the probability is also reduced, input charged particles 2 are passed through the inside of the outer cylinder electrode 5 at a large rate, and can be taken out as output charged particles 6.
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