发明名称 THIN PLATE STORAGE AND TRANSPORT CONTAINER
摘要 <p>PROBLEM TO BE SOLVED: To provide a thin plate storage and transport container which generates almost no gas and thereby hardly contaminates a silicon wafer or the like which is stored airtightly therein. SOLUTION: An aromatic polycarbonate resin has viscosity mean molecular weight of at least 14,000 and at most 30,000, and when it is heated at 150 deg.C for one hour in an airtight container, it generates gas amount of at most 1.5 ppm, calculated in terms of toluene weight and it conforms to ASTM D4526. Both the main body and a cover of a thin plate storage and transport container is constituted of such a material. A plate-like body 4 and a wafer carrier are constituted of a resin composition which has an antistatic property made of resin, whose secondary transistion temperature is 135 deg.C or above, for example, antistatic type polyether-ether ketone resin.</p>
申请公布号 JP2000068363(A) 申请公布日期 2000.03.03
申请号 JP19980239683 申请日期 1998.08.26
申请人 KAKIZAKI MAMUFACUTURING CO LTD;TEIJIN CHEM LTD 发明人 HYOBU YUKITO;YUKI AKIRA
分类号 B65D85/86;H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65D85/86
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