发明名称 ATOMIC FORCE MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide an atomic force microscope to measure a surface material with high accuracy by applying treatments for imparting swelling, etching, or a mutual reaction for emphasizing a reagent to form irregularities especially at a specific material part of the surface of an object to be measured and changes in the shape of the irregularities on an atomic force microscope. SOLUTION: The atomic force microscope is one to measure irregularities of the surface of an object to be measured by bringing the end face of its probe 11 close to the object to be measured for measuring the surface substance of the object to be measured. It characteristically performs measurements with a probe 11 on the surface of the object to be measured which is treated in a process to smooth the surface of the object to be measured and in a process to arrange a reagent 9 to form irregularities at a specific material part by bringing about a chemical reaction with the specific material of the surface of the object to be measured. It is characteristic that the specific material is a hydrophilic part 6 in the state of distribution of functional groups, that the other surface of the object to be measured is a hydrophobic part 5, and that the hydrophilic part 6 is swollen by the reagent 9.
申请公布号 JP2000065714(A) 申请公布日期 2000.03.03
申请号 JP19980235613 申请日期 1998.08.21
申请人 TOYOTA MOTOR CORP 发明人 TAKAZAWA NOBUAKI
分类号 G01B21/30;G01N1/28;G01N1/32;G01N1/36;G01N37/00;G01Q10/00;G01Q30/08;G01Q30/20;G01Q60/00;G01Q60/24;G01Q70/00;(IPC1-7):G01N13/16;G01N13/10 主分类号 G01B21/30
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