| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate control valve capable of changing a flow rate in direct proportion to the difference in pressure, and capable of executing flow rate control with reproducibility high in accuracy in the whole range of a flow rate from a small flow rate up to a great one. SOLUTION: Each ports plate 9 with plural steps provided with oil through grooves, is mounted to a valve stem 3 fitted in so as to be freely slid in reciprocation in the axial direction in a valve case 1 provided with an inlet port and an outlet port for fluid, or a communication hole with plural steps is provided for the valve stem 3 along its axial direction, and let a passage area be proportionally changed with respect to the difference in pressure by letting the number of steps of the oil through grooves communicating the inlet port with the outlet port or the number of steps of the communication hole, be changed.
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