MANUFACTURE FOR MICROBRIDGE SENSOR

摘要

PROBLEM TO BE SOLVED: To prevent a Ta2O5 film used as an etching mask from peeling and separating. SOLUTION: An insulating thin film 5 used as an etching mask when a metallic thin film 4 formed on a substrate 2 is to be patterned to form a thin film heater 6 and temperature sensors 7, 8 is formed of Ta2O5. A film thickness is made 2000Åor larger. Since the insulating thin film 5 is increased in strength, the insulating thin film 5 is hard to generate a crack even when a stress is generated because of a difference of contraction factors of the metallic thin film 4 and insulating thin film 5 in a cool process after the formation of the insulating thin film 5. A film peeling is thus prevented.