| 摘要 |
PROBLEM TO BE SOLVED: To judge the intensity data of a measuring point in an X-ray fluorescence analysis by constituting the peripheral material of a sample piece and a probe material so as to have the same linear attenuation coefficient to X-ray fluorescence radiation. SOLUTION: The primary beam 7 from the radiation source of an X-ray tube emits high energy X-ray quanta having a short wavelength. A test piece 10 is excited by this primary beam 7 incident in parallel by a collimator and the emitted X-ray fluorescence radiation 8 is parallelly directed to be received by a receiver. The sample piece 10 has a probe 12, the peripheral material 11 thereof and the flat surface 13 thereof and the lateral dimension D of the probe 12 is smaller than the lateral dimension (d) of the primary beam 7 or the measuring point and the intensity center of the primary beam 7 can be detected as a peak. Herein, both materials are selected, for example, so that only the probe 12 emits X-ray fluorescence radiation 8 within an exciting wavelength range. Further, both materials are selected so as to have the same linear attenuation coefficient with respect to the X-ray fluorescence radiation 8 so as to contain an alloy containing, for example, respectively different alloy components. |
