| 摘要 |
PROBLEM TO BE SOLVED: To provide a rolling bearing capable of being sufficiently used in the clean atmosphere and the vacuum environment for a semiconductor manufacturing device and having little particles scattering from the bearing to the outside. SOLUTION: A sheet-like permanent magnet 8 is fixed on the surface of the bearing inner space side of a shield plate 6. Magnetic fluid 7 is stuck to the permanent magnet 8. An inner ring 2 and a cage front surface 5 are constituted of non magnetic materials. Particles generated in a bearing are attracted to the magnet 8, caught and held, if they are magnetic substances. Moreover, they are caught and held in the magnetic fluid 7 to be stuck to the magnet 8 regardless of magnetism.
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