| 摘要 |
PROBLEM TO BE SOLVED: To obtain a light wave interference measuring apparatus for measuring the amount of movement of an object moving at a high speed, in a light wave interference measuring apparatus for measuring the amount of movement of an object moving at a high speed. SOLUTION: This measuring apparatus has a movable mirror 4 movably installed on measurement optical paths 201, 205, a fixed mirror 5 fixed on reference optical paths 203, 206, first interferometers (2, 3, 7 and 8) detecting an interference light of first lights reflected by the movable mirror 4 and the fixed mirror 5, and second interferometers (2, 3, 9, 12 and 8) detecting a interference light of second lights reflected by the movable mirror 4 and the fixed mirror 5 and measures the amount of movement of the movable mirror 4, on the basis of detected results of the first and the second interferometers. The second interferometers (2, 3, 9, 12 and 8) are so arranged that the optical path 205 of the second interferometers is inclined by a specific angle to the optical path 201 of the first interferometers (2, 3, 7 and 8).
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