| 摘要 |
PROBLEM TO BE SOLVED: To expedite energy conservation by providing a panel for shutting off between as clean room and an auxiliary machine room, and providing a free access floor via a gap on the panel, thereby reducing a circulating air volume of clean air. SOLUTION: A clean room 10 and an auxiliary machine room 20 are shut off by a panel 30 having high rigidity like a concrete. Grating panels are, for example, spread all over the panel 30 via a predetermined gap 40 to form a free access floor 50. A plenum space 60 is formed at an upper side of a ceiling of the room 10, and clean air in which cleanliness is raised by a high performance filter 70 arranged on the ceiling is supplied into the room 10 via a down flow. Since the clean air in the room 19 is circulated not via the room 20 but via the gap 40, a circulating capacity of the air is reduced as compared with a conventional type for circulating the air via the room 20, and cooling energy can be reduced.
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