PURE WATER SUPPLYING EQUIPMENT AND SUBSTRATE WASHING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide the pure water supplying equipment capable of preventing pure water from static charging. SOLUTION: This pure water supplying equipment is provided with: pure water transport piping 41 formed of a high molecular material; a discharge pipe 42 for static elimination and formed of a semiconductor material and coupled to the tip of the pure water transport piping 41; and a grounding means 43 for grounding the discharge pipe 42 for static elimination. An electric charge charged to pure water is discharged through the pipe wall of the pipe 42 for static elimination made of the semiconductor material and the grounding means 43.