发明名称 |
DRIVE MECHANISM FOR VACUUM DEVICE AND VACUUM DEVICE |
摘要 |
A vacuum device having a lift mechanism which is small in size and does not require a special means or a mechanism for vacuum seal, comprising an air bag storage container (41) which is installed fixedly to an air-tight container and of which one end is open, an air bag (42) stored in the storage container, and a means to supply high-pressure gas into the air bag (42) through the air bag storage container (41), whereby, because the high-pressure gas is fed into the air bag (42) by a high-pressure gas feed means, a part of the air bag (42) is projected from the open end part of the air bag storage container (41) and an objective body is moved in the vacuum container.
|
申请公布号 |
WO0011237(A1) |
申请公布日期 |
2000.03.02 |
申请号 |
WO1999JP04434 |
申请日期 |
1999.08.18 |
申请人 |
SHIBAURA MECHATRONICS CORPORATION;KINOKIRI, KYOJI;IKEDA, JIRO;ODA, YOSHIFUMI |
发明人 |
KINOKIRI, KYOJI;IKEDA, JIRO;ODA, YOSHIFUMI |
分类号 |
H01L21/302;B01J3/00;B01J3/02;C23C14/50;C23C14/56;G11B7/26;H01L21/673;(IPC1-7):C23C14/50;C23C16/44;H01L21/68 |
主分类号 |
H01L21/302 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|