发明名称 DRIVE MECHANISM FOR VACUUM DEVICE AND VACUUM DEVICE
摘要 A vacuum device having a lift mechanism which is small in size and does not require a special means or a mechanism for vacuum seal, comprising an air bag storage container (41) which is installed fixedly to an air-tight container and of which one end is open, an air bag (42) stored in the storage container, and a means to supply high-pressure gas into the air bag (42) through the air bag storage container (41), whereby, because the high-pressure gas is fed into the air bag (42) by a high-pressure gas feed means, a part of the air bag (42) is projected from the open end part of the air bag storage container (41) and an objective body is moved in the vacuum container.
申请公布号 WO0011237(A1) 申请公布日期 2000.03.02
申请号 WO1999JP04434 申请日期 1999.08.18
申请人 SHIBAURA MECHATRONICS CORPORATION;KINOKIRI, KYOJI;IKEDA, JIRO;ODA, YOSHIFUMI 发明人 KINOKIRI, KYOJI;IKEDA, JIRO;ODA, YOSHIFUMI
分类号 H01L21/302;B01J3/00;B01J3/02;C23C14/50;C23C14/56;G11B7/26;H01L21/673;(IPC1-7):C23C14/50;C23C16/44;H01L21/68 主分类号 H01L21/302
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