发明名称 |
Infrared focal plane array |
摘要 |
A two-dimensional infrared focal plane array of temperature detecting units is provided with the temperature detecting units being arranged for every pixel in a two-dimensional arrangement on a semiconductor substrate. Each temperature detecting unit is formed integrally with readout circuitry. Each temperature detecting unit further has a temperature detecting portion which is supported by support legs made of a high thermal resistance material to reduce heat flow to the semiconductor substrate. Each temperature detecting unit also has a temperature detecting element with an infrared ray absorbing portion which is spliced by at least one splicing pillar with the temperature detecting element.
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申请公布号 |
US6031231(A) |
申请公布日期 |
2000.02.29 |
申请号 |
US19970927407 |
申请日期 |
1997.09.10 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
KIMATA, MASAFUMI;ISHIKAWA, TOMOHIRO;TSUTSUMI, KAZUHIKO;HATA, HISATOSHI |
分类号 |
G01J1/02;G01J5/02;G01J5/10;G01J5/12;H01L27/14;H01L27/146;H01L35/32;H01L37/02;H04N5/33;(IPC1-7):G01J5/20 |
主分类号 |
G01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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