| 摘要 |
PROBLEM TO BE SOLVED: To provide a pallet for ingot carriage capable of carrying ingot of different shapes and a wafer manufacturing system using the pallet for ingot carriage. SOLUTION: An ingot support base 14 and a mounting plate support base 16 are installed and constituted on a pallet main body 12. Single ingot In is carried in a state where it is placed on the ingot support base 14. Additionally, the ingot In in a state where it is adhered to a mounting plate M or slide wafer is carried in a state where it is suspended by the mounting plate M by installing both end parts of the mounting plate M on the mounting plate support base 16.
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