TREATMENT OF WATER AND APPARATUS THEREFOR

摘要

PROBLEM TO BE SOLVED: To increase the purity of ultrapure water by removing almost all org. substances contained in water to be treated. SOLUTION: An oxidative degradation tank 13 in which org. substances dissolved in water to be treated are subjected to oxidative degradation, an activated carbon adsorption tank 1 in which dissolved substances in the water to be treated are adsorbed on activated carbon with previously adsorbed ionic org. substances and a unit 15 for removing ionic org. substance are connected with pipes along a passage of the water to be treated to obtain the objective apparatus 11 for treating water.