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发明名称
Furnace for processing semiconductor wafers
摘要
申请公布号
AU5063699(A)
申请公布日期
2000.02.28
申请号
AU19990050636
申请日期
1999.08.02
申请人
PERSYS TECHNOLOGY LTD.
发明人
GIDEON DRIMER
分类号
F27B5/14
主分类号
F27B5/14
代理机构
代理人
主权项
地址
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