摘要 |
PURPOSE:To increase the capacitance of a stacked capacitor by specifying their shape and arrangement without using other special techniques. CONSTITUTION:Word lines 204 are arranged in parallel with an x-axis, while bit lines are arranged in parallel with a y-axis. Storage electrodes 203 are arranged oblique both to the word lines and to the bit lines. For example, the electrodes 203 are rectangular and thinner than the conventional, and they are parallel with the line between the original and a point (1,4). |