| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus in which, when the placement error of an inspection jig is generated, the displacement error is sensed automatically before a testing apparatus is operated and in which the damage or the like of a contact part is prevented by a method wherein the inspection jig is attached to a probe which is rotatable around its shaft, the probe is turned around its shaft and the inspection jig is brought into contact with the face, to be inspected, of an object to be tested. SOLUTION: In a probe 20 which can be turned around the center of a shaft 21, an inspection jig 25 is attached to one side of the shaft 21, and a slope 22 is provided on the other side. A pressure mechanism 30 is provided with slopes 31. When the mechanism 30 is moved, the slope 31 on one side comes into contact with the slope 22 of the probe 20. When it is moved further upward, the probe 20 is turned in the clockwise direction around the shaft 21. Thereby, the inspection jig 25 which is attached to the probe 20 comes into contact with the pattern face 11, to be inspected, of an object 10 to be tested. The object 10 to be tested and the probe 20 are arranged so that the contact face of the inspection jig 25 comes uniformly into contact with the whole face of the pattern face 11, to be inspected, at the time when the inspection jig 25 comes into contact.
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