发明名称 REMOVING METHOD OF CORROSION-RESISTING MEMBRANE MATERIAL
摘要 PURPOSE: The exfoliating method is provided to remove corrosion-resisting membrane material from objective material using a pressure sensitive attachment sheet. CONSTITUTION: The exfoliating method of a corrosion-resisting membrane material has the steps of: applying the pressure sensitive attachment sheet on the upper surface of the corrosion-resisting membrane material exists on the objective material; exfoliating the pressure sensitive attachment sheet with the corrosion-resisting membrane material to remove the corrosion-resisting membrane material from the objective material; cooling the pressure sensitive attachment sheet with the corrosion-resisting membrane material and the objective material under 0 degree or cooling the pressure sensitive attachment sheet with the corrosion-resisting membrane material and the objective material at a room temperature after heating the pressure sensitive attachment sheet to have more than 100 degree to increase the exfoliating effect.
申请公布号 KR20000011540(A) 申请公布日期 2000.02.25
申请号 KR19990027224 申请日期 1999.07.07
申请人 NITTO DENKO CO., LTD. 发明人 AGE TOYOTA;MAKOTO NAMIKAWA;TAKUJI OKEYUI
分类号 H01L21/302;(IPC1-7):H01L21/302 主分类号 H01L21/302
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