摘要 |
PROBLEM TO BE SOLVED: To provide a highly precise touch signal probe to allow size reduction. SOLUTION: This touch signal probe 10 has a stylus holder 11, an oscillator 12 supported by the stylus holder 11 and having a contact part 12A for contacting with a measured object in its tip, an oscillating means 13A for vibrating the oscillator 12 in an axial direction under a resonant condition, and a detecting means 13B for detecting contact of the oscillator 12 based on vibration change of the oscillator 12 at the time of the contact with the measured object. The oscillator 12 is supported by the stylus holder 11 in two support points A, B to sandwich a node of the vibration of the oscillator 12. The node of the vibration is formed between the two support points A, B by arranging the oscillating means 13A and the detecting means 13B astride the two support points A, B, to downsize the touch signal probe 10.
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