| 摘要 |
PROBLEM TO BE SOLVED: To detect inclination of an uneven part in a surface of a measured object, in a surface analyzer for analyzing a surface condition of the object. SOLUTION: A laser beam L1 output from a light emitter 2 is reflected with an angleθb different from an incident angleθa, when a surface 1a of a measured object 1 has an uneven part. A reflected light L2 therein gets incident in a position different from a coordinate origin set at first when it gets incident onto a light receiving face 3a of a light receiver 3. For example, a light receiving element 32 different from a light receiving element 31 existing in the coordinate origin detects the reflected light L2. Since a distance between a reflection point P1 on the surface 1a of the reflected light L2 and the receiving face 3a is known preliminerily, the reflection angleθb of the light L2 is found based on a coordinate position of the detecting light receiving element 32. Since the reflection angleθb is expressed by an expressionθb=θa+2θc when theθc represents inclination of the uneven part of the reflection point P1 on the surface 1a, theθc is found by substituting theθa andθb in the expression to detect an inclination angle of the uneven part.
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