METHOD FOR HARDENING SURFACE OF RESIN, SURFACE HARDENED RESIN, METHOD FOR MANUFACTURING SURFACE HARDENED RESIN, AND INFORMATION CARRIER-USING RESIN DISK SUBSTRATE

摘要

PURPOSE: A method for hardening a surface of a resin and a surface hardened resin are provided to improve the surface of a material to be treated in a short time under a low energy. CONSTITUTION: An ion transferred from an ion source(31) of a device for injecting an ion is injected to a substrate arranged in a vacuum chamber(30) through a mass separating coil(32), an accelerating and decelerating lens(33), and a scanning coil(34). The substrate is supported in a rotary type by a substrate rotating pallet(35) while the inside of the vacuum chamber becomes a vacuum state by a venting apparatus(36). By using the device, an ion injection and a physical film adherence are operated by transforming an ion energy, and the ion injection and the physical film adherence are operated quickly in case of more use of a bias instrument.