| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of the polymer optical waveguide which is extremely inexpensive and has superior heat resistance without using a photoprocess and a process for RIE. SOLUTION: This is a method for manufacturing a polymer optical waveguide having at least a substrate 2, a clad layer 3 formed on the substrate 2, and a core 5 formed on the clad layer 3, and the clad layer is formed through a process for forming a polymer film on the substrate 2 and a process for heating and holding the polymer film at temperature above the glass dislocation temperature of the polymer film and below thermal decomposition start temperature and forming a recessed part or projection part on the polymer film by pressing the polymer film by using a metal mold. Here, the polymer film is, preferably, a polyimide film and, specially preferably, a polyimide fluoride film. |
