| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the control performance of a substrate stage, without being affected by the specific oscillation of a projecting optical system being a reference for detecting the position of a substrate stage. SOLUTION: In this position detecting device, the position of a projecting optical system 4 is detected (15), and the position of a substrate stage 6 is detected (16), and the specific oscillation frequency components of the projecting optical system 4 are removed by a correcting part 19 which is a low-pass filter, and the substrate stage 6 is controlled by a servo arithmetic part 20, drive amplifier 21, and control part 17. Thus, a servo loop for controlling the driving of the substrate stage 6 can be prevented from being affected by the specific oscillating frequencies of the projecting optical system 4, and even when the control performance of the servo is increased, oscillation by the specific oscillating frequencies can be prevented. Therefore, the substrate stage 6 can be quickly controlled.</p> |
