发明名称 Gas recovery unit
摘要 Provided is a gas recovery unit, which unit is provided on an exhaust gas passage of a gas reactor, and which unit can effectively purify and recover a specified gas component from an exhaust gas without imparting any influence on the environment of said gas reactor. The gas recovery unit is provided on an exhaust gas passage for leading an exhaust gas from a gas reactor so as to purify and recover a predetermined gas in the exhaust gas, and comprises a differential pressure regulation valve on said exhaust gas passage, an air compressor downstream of said differential pressure regulation valve on said exhaust gas passage, a connection for connecting an exhaust gas purification passage to said exhaust gas passage upstream of said differential pressure regulation valve with a gas purifier on said exhaust gas purification passage. The unit further comprises a differential pressure measurement means for measuring a differential pressure between the upstream side and the downstream side of said differential pressure regulation valve and a differential pressure control means for controlling the degree to which said differential pressure regulation valve is open on the basis of a differential pressure measured by said differential pressure measurement means. <IMAGE>
申请公布号 EP0980701(A1) 申请公布日期 2000.02.23
申请号 EP19990401792 申请日期 1999.07.18
申请人 L'AIR LIQUIDE, SOCIETE ANONYME POUR 发明人 YAMASHITA, NAOHIKO;SHIMOURA, TOSHIYUKI
分类号 C01B3/50;B01D53/04;B01D53/34;C01B23/00;C23C16/44;H01L21/205 主分类号 C01B3/50
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