发明名称 Automated chemical drain system
摘要 The present invention provides an automated chemical drain system which includes a buffer tank for collecting used chemical from a process machine, at least two level sensors in the buffer tank for sensing a fluid level and sending out a signal, a controller for receiving the signal from the level sensors and then sending out a second signal to a solenoid controlled valve when the first signal exceeds a threshold value, a solenoid controlled valve that is in fluid communication with the buffer tank and a collection tank, and a collection tank for collecting used chemical from the buffer tank. The collection tank may further be provided with a weight sensing device such that a signal may be sent out to the controller when the weight of the collection tank exceeds a maximum allowable value so that the controller shuts off the solenoid controlled valve to avoid overflow in the collection tank and to alert a maintenance operator to empty the collection tank.
申请公布号 US6026837(A) 申请公布日期 2000.02.22
申请号 US19970856631 申请日期 1997.05.14
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHEN, J. S.
分类号 G05D9/12;(IPC1-7):F16K21/16;F16K31/02;F16K31/12 主分类号 G05D9/12
代理机构 代理人
主权项
地址