| 摘要 |
PROBLEM TO BE SOLVED: To allow a cantilever to softly approach a sample speedily by changing voltage being applied to a piezo drive element, by allowing the cantilever to take shelter from the sample, by changing the voltage again, and by allowing the cantilever to approach the sample. SOLUTION: When the measurement of a place on a sample is completed, voltage that specifies a set point from a computer 34 is changed, feedback is applied from a state where a cantilever approaches the sample so that the cantilever is vibrated by larger amplitude, and a piezo drive element 38 allows the cantilever to take shelter from the sample. Then, scanning in the direction of the plane of the sample is stopped, and the cantilever is moved to the next measurement place of the sample. In this case, to prevent a probe from being instantaneously pushed into the sample due to the abrupt approach of the cantilever to the sample, the gain of an amplifier 35 is set lower than that on measurement, and set point specified voltage is returned to voltage on measurement. When approach is completed, the gain of the amplifier 35 is returned to a setting value on measurement, and the scanning of the probe is restarted.
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