Modular high frequency integrated circuit structure
摘要
<p>Disclosed is a manufacturable silicon-based modular integrated circuit structure having performance characteristics comparable to high frequency GaAs-based integrated circuit structures, comprising materials and made in process steps which are compatible with existing low cost silicon-based integrated circuit processing. <IMAGE></p>
申请公布号
EP0980095(A1)
申请公布日期
2000.02.16
申请号
EP19990306215
申请日期
1999.08.05
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BARTUSH, THOMAS ADAM;HARAME, DAVID LOUIS;MALINOWSKI, JOHN C.;PICIACCHIO, DAWN T.;TESSLER, CHRISTOPHER L.;VOLANT, RICHARD PAUL