| 摘要 |
PROBLEM TO BE SOLVED: To produce a ceramic fine pattern by using a precursor of ceramics having high stability in air, capable of largely varying its solubility to a solvent by reaction to UV and capable of forming a fine pattern of a thin gel film convertible into an oxide or nonoxide pattern by heat treatment. SOLUTION: A precursor of ceramics obtd. by adding an alkanolamine to a metal-contg. compd. having at least one of alkoxy, carboxyl, hydroxyl, amino and halogen groups in a solvent is applied on a substrate and irradiated with UV through a mask and the unirradiated part is removed with a solvent. The resultant ceramic fine pattern is heat-treated in an oxidizing atmosphere. |
