| 摘要 |
<p>PROBLEM TO BE SOLVED: To economically and automatically inspect an X-ray mask and a similar conductive board by using a charged particle beam, by accurately positioning the charged particle beam on the board, deflecting/scanning the charged particle beam to/in a desired position, and detecting at least a single charged particle of a secondary charged particle, a backward scattering charged particle and a transmitted charged particle generated from the board. SOLUTION: An electron beam 100 is deflected by a pair of electrostatic prelens deflectors 101, 103, and a beam is converged on the periphery of a point on an objective lens 104 to be scanned with the surface of a mask 57 as the center. Next, a secondary electron is taken out upward by passing through the objective lens 104, and is defelected toward a detector 117 by deflectors 113, 112 to be sent out of a front end amplifier 122 and a high voltage insulating fiber optical link 125. A transmitted electron is transmitted through a transmitted electron detector 129 and a fiber optical link 135 by passing through the mask 57, and a backward scattering electron is sent out through a backward scattering electron detector 160 to be inspected by using these charged particles.</p> |
