| 摘要 |
PROBLEM TO BE SOLVED: To eliminate a mechanical backlash occurring at an optical path length change time and to precisely vary an optical path length of several hundredμm or above with control of an analog voltage in an optical path length controller. SOLUTION: In the optical path length controller provided with a reflector 18 reflecting incident parallel beams, a parallel moving mechanism 16 parallel moving the reflector 18 and a position control means operating the parallel moving mechanism 16 and controlling the position of the reflector l8, a bimorph type piezoelectric element 16A is used as a position control means, and the parallel moving mechanism 16 is formed by a parallel leaf spring mechanism consisting of the bimorph type piezoelectric element 16A and a leaf spring 16B parallel arranged. Further, the controller is provided with a position control drive circuit 19 applying a control voltage to the bimorph type piezoelectric element 16A and controlling a displacement amount. Further, the reflector is a right-angle prism reflector 18 reflecting the parallel beams on an optical axis parallel to the optical axis of the incident parallel beams.
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