| 摘要 |
PROBLEM TO BE SOLVED: To suppress the phenomena of liquid flying high from a hood member and adhering to the bottom of a substrate, and the phenomena of the space under the substrate getting in negative pressure condition. SOLUTION: A substrate dryer is equipped with the first rotator 61, a motor, a hood member 40 above the motor, and a cover plate 50 having a small hole 50a. The first rotator 61 has a round hole 61a at the cent and retains a substrate W through a support pin 63. The cover plate 50 is positioned between the substrate W and the hood member 40, and roughly covers the round hole 61a. A gap C is opened between the cover plate 50 and the first rotator 61 by a spacer 51. At drying of a substrate, atmosphere flows to the space between the first rotator 61 and the substrate W from the space under the first rotator 61, passing through this gap C.
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