| 摘要 |
<p>PROBLEM TO BE SOLVED: To keep relative positional relation between the number of slurry supply holes and the number of carriers the same at all times and make the effect on machining accuracy by slurry uniform for each workpiece by providing integer multiple relation between these numbers. SOLUTION: Each workpiece carrier 7 is arranged at an equal interval in such a way that positions of workpiece hold holes between each workpiece carrier 7 become point-symmetrical with respect to each other, the number of slurry supply holes 17 in an upper surface panel 4 is integer multiple of the arrangement number of the workpiece carriers 7, and the slurry supply holes 17 are arranged in point-symmetry consisting of symmetrical axes having the same number as the arrangement number of the workpiece carriers 7. Moreover, the number of connection bars 15 is integer multiple of the arrangement number of the workpiece carriers 7, they are arranged at an equal interval, and positional relation of slurry supply hole 17 and the connection bar 15 for each workpiece carrier 7 during rotation and revolution motion is kept the same at all times.</p> |
