| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a probe for electrical characteristic measurement of a flat display device substrate capable of rapid and right measurement by electrical measurement with the high-impedance probes brought into simultaneous contact with a plurality of electrodes of the flat display device substrate. SOLUTION: A plurality of probes 2 are fixed to one substrate by the arrangement of their tips corresponding to that of a plurality of electrodes of a particular flat display device substrate 1 so that the tips of the probes 2 can come into simultaneous contact with the corresponding electrodes of the flat display device substrate 1, and at least, a part of the probes 2 is also equipped with an FET. Measurement is made by outputting a signal input into the probe tips, via the FET with a high input impedance.</p> |
