MANUFACTURE OF SOLAR CELL, MANUFACTURE OF THIN-FILM SEMICONDUCTOR, METHOD FOR SEPARATING THIN-FILM SEMICONDUCTOR, AND METHOD FOR FORMING SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide a simple process for manufacturing a thin-film crystal solar cell of good characteristics, at low cost with mass-productivity. SOLUTION: A crystal silicon substrate is anodized to form a porous layer 102, on which a thin-film crystal is grown by an epitaxial growing method. An opening part 105 extending from the grown crystal surface to the porous layer 102 is provided by a laser beam 104, and the porous layer is selectively etched through the opening part to separate the thin-film crystal from the substrate. The separated thin-film crystal is transferred to other supporting substrate to form a solar cell. The substrate is regenerated for repeated use, resulting in effective use of a material for a low-cost solar cell.