| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a charged particle beam device having an excellent operability and having no necessity of readjustment of contrast and brightness at the time of switching a detection system. SOLUTION: When a secondary electron signal is selected by a signal selection switch on an operation image-plane by operating a mouse 21, a control means 14 controlled by a computer 19 displays the secondary electron signal on an image indicator 22 by controlling a switch 17. At the same time, when a contrast adjusting slide bar is moved by a mouse cursor on the operation image-plane, amplification degrees of a secondary electron amplifier 15 and a reflected electron amplifier 16 are relatedly adjusted in response to it, and when a brightness adjusting slide bar is moved, bias values of the amplifiers are relatedly adjusted in response to it. Therefore, when a reflected electron signal is selected by the mouse cursor and an image thereof is displayed thereafter, readjustment of the contrast and the brightness of the image is not required.</p> |
