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发明名称
VACUUM LAMINATING APPARATUS AND METHOD
摘要
申请公布号
KR100242854(B1)
申请公布日期
2000.02.01
申请号
KR19960033148
申请日期
1996.08.09
申请人
CANON KABUSHIKI KAISHA
发明人
ITOYAMA, SHIGENORI;FUKAE, KIMITOSHI;INOUE, YUJI
分类号
H01L31/04;H01L31/18;(IPC1-7):H01L31/04
主分类号
H01L31/04
代理机构
代理人
主权项
地址
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