| 摘要 |
PROBLEM TO BE SOLVED: To minimize an influence of a measuring error occurring by a rotation of a reticle fine regulating stage by receiving a synchronizing error by a reticle fine regulating stage control circuit, and converting it into an error of a position to the center of gravity of the stage by using a Jacobian differential coordinate conversion. SOLUTION: A trajectory command signal from a trajectory instruction unit 202 is sent to a reticle coarse regulating stage control circuit 210. However, the signal is first multiplied by a desired contraction rate via a multiplier circuit 208, thereby obtaining a coarse regulating stage trajectory command signal. A synchronizing error signal representing a synchronizing errorΔR is received by a differential coordinate converter 220 to cause a positional error signal for reflecting an error of the position of a center of gravity of the reticle fine regulating stage. The converter 220 uses a multiple of '4' as a contraction rate by a multiplier block 208 by a digital signal processor or microprocessor programmed by a Jacobian coordinate conversion. |
