MANUFACTURING CONTROL SYSTEM CAPABLE OF A MANUFACTURING LINE EASILY AND ITS DATA MODIFYING METHOD,申请号KR19970022164-传众专利搜索

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发明名称	MANUFACTURING CONTROL SYSTEM CAPABLE OF A MANUFACTURING LINE EASILY AND ITS DATA MODIFYING METHOD
摘要
申请公布号	KR100242507(B1)	申请公布日期	2000.02.01
申请号	KR19970022164	申请日期	1997.05.30
申请人	NEC CORPORATION	发明人	SHADA, TOSHIHIRO
分类号	H01L21/02;B65G61/00;G05B15/02;G05B19/418;G06Q50/00;G06Q50/04;(IPC1-7):H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
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