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发明名称
CMP APPARATUS
摘要
申请公布号
KR200168401(Y1)
申请公布日期
2000.02.01
申请号
KR19960048608U
申请日期
1996.12.13
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
KIM, HEE JIN
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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